產(chǎn)品[
批量生產(chǎn)/實(shí)驗(yàn)室用臥式爐
]資料
如果您對(duì)該產(chǎn)品感興趣的話,可以
產(chǎn)品名稱:
批量生產(chǎn)/實(shí)驗(yàn)室用臥式爐
產(chǎn)品型號(hào):
Model 2000
產(chǎn)品展商:
其它品牌
產(chǎn)品文檔:
無(wú)相關(guān)文檔
簡(jiǎn)單介紹
批量生產(chǎn)/實(shí)驗(yàn)室用臥式爐From experimental usage to mass production, various equipment configuration is available
Batch:25 to 150 wafers processing is available
1 to 4 stacks furnace configuration
批量生產(chǎn)/實(shí)驗(yàn)室用臥式爐的詳細(xì)介紹
批量生產(chǎn)/實(shí)驗(yàn)室用臥式爐：
From experimental usage to mass production, various equipment configuration is available
Batch:25 to 150 wafers processing is available
1 to 4 stacks furnace configuration is implemented for taking advantage of limited square available
2 to 8 inch and 300mm wafer size are available
LGO heater for Low and medium high temperature, HGC heater for high temperature are provided for excellent temperature performance
Proposing equipment configuration according to the customer’s needs based on usage, space, and budget
Simple and well equipped control system
| Heater | | LGO heater, HGC heater |
|---|
LGO heater
(Operation temp.) | H40×117/175
(400~1150℃) |
|---|
HGC heater
(Operation temp.) | 16×86
(400~1200℃) |
|---|
| Flat zone length | 250/800 |
|---|
| Wafer size | to 300 mm |
|---|
| Temp. control | 3 Zone |
|---|
| Transfer equipment | Boat elevator, Boat loader, Cantilever loader, Soft loader |
|---|