產(chǎn)品[
對(duì)應(yīng)300mm Wafer的小型立式爐
]資料
如果您對(duì)該產(chǎn)品感興趣的話,可以
產(chǎn)品名稱:
對(duì)應(yīng)300mm Wafer的小型立式爐
產(chǎn)品型號(hào):
VF-5700
產(chǎn)品展商:
其它品牌
產(chǎn)品文檔:
無(wú)相關(guān)文檔
簡(jiǎn)單介紹
對(duì)應(yīng)300mm Wafer的小型立式爐Mini Batch, flexible 25 to 50 wafers batch processingMax 12 FOUP stocksHigh throughput by high-power heater with fast heat upHigh-speed wafer transfer by use of single/five wafers
對(duì)應(yīng)300mm Wafer的小型立式爐的詳細(xì)介紹
對(duì)應(yīng)300mm Wafer的小型立式爐:
Mini Batch, flexible 25 to 50 wafers batch processing
Max 12 FOUP stocks
High throughput by high-power heater with fast heat up
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1250×D2000×H2850mm |
|---|
| Heater | High power LGO heater(ID ø500mm) |
|---|
| Flat zone length | 500mm |
|---|
| Wafer size | 300mm |
|---|
| Batch size | 50wafers |
|---|
| I/O port | 2 |
|---|
| Number of FOUP stock | 12(standard) |
|---|
| Finger | 5wafers+single wafer |
|---|
| Controller | Model VSC1000 |
|---|
| Option | Forced-cooling system, N2 load lock,
HOST communication(GEM300), Stocker less type(VF-5700-F2) |
|---|