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對(duì)應(yīng)300mm Wafe的立式爐
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產(chǎn)品名稱:
對(duì)應(yīng)300mm Wafe的立式爐
產(chǎn)品型號(hào):
VF-3000
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡單介紹
對(duì)應(yīng)300mm Wafe的立式爐Low-cost equipment for back end users,Mini batch, 50 to 75 wafers processing is available for R&D to mass production line
4 to 8 inch wafer size is available
Max 4 cassette stocks
對(duì)應(yīng)300mm Wafe的立式爐的詳細(xì)介紹
對(duì)應(yīng)300mm Wafe的立式爐:
Low-cost equipment for back end users
Mini batch, 50 to 75 wafers processing is available for R&D to mass production line
4 to 8 inch wafer size is available
Max 4 cassette stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1200×D1400×H2550mm |
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| Heater | LGO heater |
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| Flat zone length | 350~500mm |
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| Wafer size | 4~8inch |
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| Batch size | 75wafers |
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| I/O port | 4 |
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| Number of FOUP stock | 4 |
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| Finger | single wafer |
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| Controller | Model 880 |
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| Option | Forced-cooling system, Convertible wafer size |
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